ELECTRONIC DEVICE INCLUDING AN INSULATING STRUCTURE AND A PROCESS FOR FORMING THE SAME

摘要

An electronic device can include a substrate and an insulating structure. In an aspect, an anchor can include a portion of the substrate that extends into the insulating structure or a portion of the insulating structure that extends into the substrate. In another aspect, a process of forming an electronic device can include patterning a substrate to define a trench and a first anchor; and forming an insulating structure within the trench and adjacent to the first anchor. In a further aspect, a process of forming an electronic device can include patterning a substrate to define a trench having a sidewall and a first pillar spaced apart from the sidewall; doping the first pillar to change a conductivity type of the first pillar; and forming an insulating structure that surrounds the first pillar.

主权项

1. An electronic device comprising:
a substrate; an insulating structure; and a first anchor including a portion of the substrate that extends into the insulating structure or a portion of the insulating structure that extends into the substrate.