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摘要
本発明は、多孔金属基材の表面の不純物の影響を受けにくく、漏れ電流が小さく、信頼性の高いコンデンサを提供する。本発明のコンデンサは、多孔金属基材と、前記多孔金属基材上に原子層堆積法により形成された第1バッファー層と、前記第1バッファー層上に原子層堆積法により形成された誘電体層と、前記誘電体層上に形成された上部電極とを有して成る。
申请公布号
JPWO2015118902(A1)
申请公布日期
2017.03.23
申请号
JP20150560903
申请日期
2015.01.09
申请人
株式会社村田製作所
发明人
佐伯 洋昌;井上 徳之;荒川 建夫;岩地 直樹
分类号
H01G9/04;H01G9/00;H01G9/052;H01G9/07
主分类号
H01G9/04
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