MULTIPLE CONTROL MODES

摘要

Systems and methods for using variables based on multiple states associated with a plasma system are described. A method includes determining whether the state associated with the plasma system is a first, second, or third state and determining a first variable upon determining that the state is the first state. The method further includes determining a second variable upon determining that the state is the second state and determining a third variable upon determining that the state is the third state. The method includes determining whether each of the first variable, the second variable, and the third variable is within a corresponding range from a corresponding threshold. The method includes providing an instruction to change power supplied to a plasma chamber upon determining that the first, second, or third variable is outside the corresponding range from the corresponding threshold.

主权项

1. A method for controlling different variables during different states, comprising:
determining whether a state associated with a plasma system is a first state, a second state, or a third state; determining a first variable in response to determining that the state associated with the plasma system is the first state; determining a second variable in response to determining that the state associated with the plasma system is the second state; determining a third variable in response to determining that the state associated with the plasma system is the third state; determining whether the first variable is within a range from a threshold value of the first variable; determining whether the second variable is within a range from a threshold value of the second variable; determining whether the third variable is within a range from a threshold value of the third variable; providing an instruction to maintain power supplied by a radiofrequency (RF) generator of the plasma system upon determining that the first variable is within the range from the threshold value of the first variable; and providing an instruction to change the power supplied by the RF generator upon determining that the first variable is outside the range from the threshold value of the first variable.