| 发明名称 |
MICROMECHANICAL LAYER SYSTEM |
| 摘要 |
A micromechanical layer system, having at least two mechanically active functional layers patterned independently of each other, which are arranged vertically one on top of the other and are functionally coupled to each other. |
| 申请公布号 |
US2017081183(A1) |
申请公布日期 |
2017.03.23 |
| 申请号 |
US201515311354 |
申请日期 |
2015.05.29 |
| 申请人 |
Robert Bosch GmbH |
发明人 |
Armbruster Simon;Straub Rainer;Pinter Stefan;Hausner Ralf;Haberer Dietmar;Baader Johannes |
| 分类号 |
B81C1/00;G02B26/08;B81B7/00 |
主分类号 |
B81C1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
Stuttgart DE |
