| 摘要 |
Disclosed is a vacuum device that is provided with an extremely high-vacuum exhaust pump. The extremely high-vacuum exhaust pump is provided with: a bar-like cathode (101) containing a non-evaporating getter alloy; a cylindrical anode (103) that is disposed to surround the periphery of the cathode; and coils (104) or ring-like permanent magnets, which are disposed to sandwich openings at the top and bottom of the cylindrical anode (103) and to surround the bar-like cathode (101). Consequently, the size and weight of the extremely high-vacuum exhaust pump can be reduced, and the vacuum exhaust pump can be disposed at a desired area of the vacuum device. |
