Monitoring Laser Beams

摘要

A device includes a driver laser arrangement including a beam source for generating a laser beam and an amplifier arrangement for amplifying the laser beam. The device also includes an apparatus for monitoring the laser beam that includes a transmissive optical element having a normal direction oriented at a tilt angle with respect to a beam axis of the laser beam. The apparatus also includes a spatially resolving detector for registering laser radiation reflected backwards by the transmissive optical element. The transmissive optical element has first and second sides that are oriented at a wedge angle with respect to one another and through which the laser beam passes. The first and second sides reflect first and second partial beams of the incident laser beam. The apparatus has an optical filter that prevents one of the reflected first and second partial beams from reaching the detector.

主权项

1. A device, comprising:
a driver laser arrangement comprising:
a beam source for generating a laser beam, andan amplifier arrangement for amplifying the laser beam; and an apparatus for monitoring the laser beam, the apparatus comprising:
a transmissive optical element having a normal direction oriented at a tilt angle with respect to a beam axis of the laser beam, anda spatially resolving detector for registering laser radiation reflected backwards by the transmissive optical element, wherein the transmissive optical element has a first side and a second side that are oriented at a wedge angle (γ) with respect to one another and through which the laser beam passes, wherein the first side reflects a first partial beam and the second side reflects a second partial beam of the laser beam incident on the transmissive optical element, and wherein the apparatus includes an optical filter that prevents one of the first and second partial beams reflected by the transmissive optical element from reaching the spatially resolving detector.