| 发明名称 |
GRID, METHOD OF MANUFACTURING THE SAME, AND ION BEAM PROCESSING APPARATUS |
| 摘要 |
A grid of the present invention is a plate-shaped grid provided with a hole. The grid is formed of a carbon-carbon composite including carbon fibers arranged in random directions along a planar direction of the grid, and the hole is formed in the grid so as to cut off the carbon fibers. |
| 申请公布号 |
US2017084419(A1) |
申请公布日期 |
2017.03.23 |
| 申请号 |
US201615366660 |
申请日期 |
2016.12.01 |
| 申请人 |
CANON ANELVA CORPORATION |
发明人 |
Tsujiyama Masashi;Nakagawa Yukito;Yasumatsu Yasushi |
| 分类号 |
H01J27/02;H01J9/14;H01J37/08 |
主分类号 |
H01J27/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A plate-shaped grid provided with a hole, wherein
the grid is formed of a carbon-carbon composite including carbon fibers arranged in random directions along a planar direction of the grid, and the hole is formed in the grid so as to cut off the carbon fibers. |
| 地址 |
Kawasaki-shi JP |
