DEVICE FOR EVALUATING A PER-UNIT-AREA PARTICULATE CONCENTRATION IN AN ENVIRONMENT WITH A CONTROLLED ATMOSPHERE, SUCH AS A CLEANROOM, AND ASSOCIATED METHOD

摘要

The invention relates to a device for evaluating a per-unit-area particulate concentration in an environment with a controlled atmosphere, such as a cleanroom, the device comprising: a transparent area (1) for deposition of the particles; an optical system (2) placed above the area for deposition of the particles, the optical system comprising a focusing system configured to emit from an optical source (21) an optical beam focused on the area for deposition of the particles, which area is transparent at the wavelength of the optical beam; a detecting system (3) placed above the area for deposition of the particles, the detecting system (3) being configured to detect an intensity of an optical beam transmitted by the area for deposition of the particles; and a scanning system (4) to which the optical system (2), the optical source (21) and the detecting system (3) are connected, the scanning system being configured to scan the area for deposition of the particles in two dimensions allowing a continuous measurement.