发明名称 |
Stimulating an optical sensor using optical radiation pressure |
摘要 |
A method of stimulating a MicroElectroMechanical Systems (MEMS) structure (e.g. a cantilever), and an optical sensor for use in such a method, using optical radiation pressure instead of electrostatic pressure, or the like. An optical pulse creates optical radiation pressure which stimulates movement of the MEMS structure and then movement of the MEMS structure may be measures. An interrogating light may be input after the optical pulse to measure movement of the MEMS structure. Advantageously, the same light source can be utilised to stimulate movement of the MEMS structure and to measure movement of the MEMS structure. |
申请公布号 |
AU2015309697(A1) |
申请公布日期 |
2017.03.23 |
申请号 |
AU20150309697 |
申请日期 |
2015.08.28 |
申请人 |
Panorama Synergy Ltd |
发明人 |
Dell, John;Faraone, Lorenzo;Jeffery, Roger;Keating, Adrian;Martyniuk, Mariusz;Putrino, Gino;Silva, Dilusha |
分类号 |
G02F1/335;B82Y20/00;G01Q20/02;G01Q70/06;G02F1/01 |
主分类号 |
G02F1/335 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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