METHOD AND APPARATUS FOR VERIFYING LIGHTING SETUP USED FOR VISUAL INSPECTION

摘要

A method for verifying a lighting setup used for inspecting a micro defect. The method includes simulating a scene including a micro defect, light source and imaging device. A position of the light source and imaging device is then optimized to form an optimized simulated setup for viewing micro defect. A shadow calibration reference (SCR) having a simulated shadow field is then rendered in a location. Next, a physical imaging device and light source are positioned based on information from the optimized simulated setup to form an optimized physical setup. A physical SCR based on information from the SCR rendering is fabricated. Next, an image is captured of a physical SCR in a corresponding location associated with each SCR rendering. The optimized physical setup is verified if at least one shadow parameter from the SCR rendering is substantially similar to a corresponding shadow parameter in a corresponding image.

主权项

1. A method for verifying a lighting setup used for inspecting a micro defect on a surface of an object, comprising:
generating a scene that includes a simulated micro defect and a simulated light source and simulated imaging device; optimizing a position of the simulated light source and imaging device to form an optimized simulated setup for viewing micro defect; generating a shadow calibration reference rendering in at least one location in a field of view of the imaging device while using the optimized simulated setup wherein the shadow calibration reference rendering includes a simulated shadow field; positioning a physical imaging device and a physical light source based on information from the optimized simulated setup to from an optimized physical setup; forming a physical shadow calibration reference based on information from the shadow calibration reference rendering; generating an image of the physical shadow calibration reference in a corresponding location in the field of view associated with each shadow calibration reference rendering wherein each image includes a physical shadow field; and comparing each shadow calibration reference rendering to an image of the physical shadow calibration reference at the corresponding location in the field of view wherein the optimized physical setup is verified if at least one shadow parameter of at least one shadow calibration reference rendering is substantially similar to a corresponding shadow parameter in a corresponding image.