SUPER-RESOLUTION OBSERVATION DEVICE AND SUPER-RESOLUTION OBSERVATION METHOD

摘要

A super-resolution observation device includes an illumination optical system that focus a first illuminating light at optical frequency ω1 and a second illuminating light at optical frequency ω2 on a region of an observation object plane; a modulation unit that modulates a property of the first illuminating light heading toward the region at a modulation frequency fm; and an extraction unit that extracts a component at the optical frequency ω1 or ω2 from a light generated in the region according to the first illuminating light and the second illuminating light, the component of which the property changes at a frequency higher than the modulation frequency fm.

主权项

1. A super-resolution observation device, comprising:
an illumination optical system focusing a first illuminating light at optical frequency ω1 and a second illuminating light at optical frequency ω2 on a region of an observation object plane; a modulation unit modulating a property of the first illuminating light heading toward the region at a modulation frequency fm; and an extraction unit extracting a component at one of the optical frequency ω1 and the optical frequency ω2 from a light generated in the region according to the first illuminating light and the second illuminating light, the component of which the property changes at a frequency higher than the modulation frequency fm.