| 摘要 |
A method for detecting a leak in a test item contained in a test chamber, having the steps of: positioning the test item in the test chamber, evacuating the test chamber, measuring the partial pressure of the gas within the test chamber during evacuation of same as measurement signal M, calculating the difference D from the curve of the signal M(t) over time t and a fit function F(t), which contains the term t-n, n being a positive rational number, and using the difference signal D to determine whether or not there is a leak in the test item. |
