| 发明名称 |
SCATTERING MEASUREMENT SYSTEM AND METHOD |
| 摘要 |
A scattering measurement system is provided, including: a light source generator for generating a detection light beam with discontinuous multi-wavelengths, and generating a multi-order diffraction light beam with three-dimensional feature information when the detection light beam is incident on an object; a detector having a photosensitive array for receiving and converting the multi-order diffraction light beam into multi-order diffraction signals with the three-dimensional feature information; and a processing module for receiving the multi-order diffraction signals and comparing the multi-order diffraction signals with multi-order diffraction feature patterns in a database so as to analyze the three-dimensional feature information of the object. |
| 申请公布号 |
US2017082536(A1) |
申请公布日期 |
2017.03.23 |
| 申请号 |
US201615369190 |
申请日期 |
2016.12.05 |
| 申请人 |
Industrial Technology Research Institute |
发明人 |
YEH Chia-Liang;CHEN Yi-Chang;KU Yi-Sha;LO Chun-Wei |
| 分类号 |
G01N21/47 |
主分类号 |
G01N21/47 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A scattering measurement system, comprising:
a light source generator configured to generate a detection light beam with discontinuous multi-wavelengths, and generate, when the detection light beam is incident on an object, a multi-order diffraction light beam with three-dimensional feature information; a detector having a photosensitive array, and configured to receive the multi-order diffraction light beam and convert the multi-order diffraction light beam into multi-order diffraction signals with the three-dimensional feature information; and a processing module configured to receive the multi-order diffraction signals, and compare the multi-order diffraction signals with multi-order diffraction feature patterns in a database and analyze the three-dimensional feature information of the object. |
| 地址 |
Hsinchu TW |
