SYSTEM, METHOD AND TEST LAYOUT FOR DETECTING LEAKAGE CURRENT

摘要

A test layout, a system, and a method for detecting leakage current are disclosed. The test layout module includes M PN junction diode leakage current test units formed in the FEOL process, parallel-connect with a classical leakage current test unit formed in the metal layer; wherein, P-regions of the PN junction diodes are connected to a high potential, N-regions of the PN junction diodes are connected to a low potential, the junction areas of the PN junction diodes are different each other, each of the PN junction diode leakage current test units is controlled by one switch respectively, the positive integer M is greater than or equal to 1. Through paralleling the PN junction diodes formed in the FEOL process with the classical leakage current test unit in the metal layer, not only the required test layout area utilized to detect the leakage current in the metal layer is reduced, but also the detecting accuracy is further enhanced.

主权项

1. A system for detecting leakage current in a metal layer, comprising:
a test layout module, a detecting module and a calculating module; the test layout module includes M PN junction diode leakage current test units formed in the FEOL process parallel-connect with a classical leakage current test unit formed in the metal layer; wherein, P-regions of the PN junction diodes are connected to a high potential, N-regions of the PN junction diodes are connected to a low potential, the junction areas of the PN junction diodes are different each other, each of the PN junction diode leakage current test units is controlled by one switch respectively, the positive integer M is greater than or equal to 1; the detecting module, utilized to detect the leakage values of the test layout module, the leakage values of each PN junction diode respectively, and the leakage values of each PN junction diode paralleled with the classical leakage current test units in the metal layer respectively; and the calculating module, utilized to calculate final leakage value in the metal layer according to the leakage values of the test layout module, the leakage values of each PN junction diode respectively, the leakage values of each PN junction diodes paralleled with the classical leakage current test units in the metal layer respectively, and the relations between them.