| 发明名称 |
SERVO INTEGRATED BPM TEMPLATE |
| 摘要 |
Provided herein is a method including forming a data zone guiding pattern and forming a servo zone guiding pattern. A servo pattern and a data pattern are simultaneously formed. Directed self-assembly of block copolymers is guided by the data zone guiding pattern and the servo zone guiding pattern. |
| 申请公布号 |
US2017084300(A1) |
申请公布日期 |
2017.03.23 |
| 申请号 |
US201615233277 |
申请日期 |
2016.08.10 |
| 申请人 |
Seagate Technology LLC |
发明人 |
Xiao ShuaiGang;Yang XiaoMin;Kuo David S.;Lee Kim Yang;Hsu Yautzong |
| 分类号 |
G11B5/855;G11B5/596;G11B20/12 |
主分类号 |
G11B5/855 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method comprising:
forming a data zone guiding pattern in a data zone; forming a servo zone guiding pattern in a servo zone, wherein servo features within the servo zone guiding pattern are larger than data features within the data zone guiding pattern; reducing the size of the servo features and the data features, wherein after the reducing the data features are shorter than the servo features; applying a brush to the data zone guiding pattern and the servo zone guiding pattern; and simultaneously forming a servo zone pattern within the servo zone and a data zone pattern within the data zone by directed self-assembly of block copolymers. |
| 地址 |
Cupertino CA US |
