发明名称 半導体装置
摘要 Provided is a bottom-gate transistor including an oxide semiconductor, in which electric-field concentration which might occur in the vicinity of an end portion of a drain electrode layer (and the vicinity of an end portion of a source electrode layer) when a high gate voltage is applied to a gate electrode layer is reduced and degradation of switching characteristics is suppressed, so that the reliability is improved. The cross-sectional shape of an insulating layer which overlaps over a channel formation region is a tapered shape. The thickness of the insulating layer which overlaps over the channel formation region is 0.3 μm or less, preferably 5 nm or more and 0.1 μm or less. The taper angle &thetas; of a lower end portion of the cross-sectional shape of the insulating layer which overlaps over the channel formation region is 60° or smaller, preferably 45° or smaller, further preferably 30° or smaller.
申请公布号 JP6099920(B2) 申请公布日期 2017.03.22
申请号 JP20120213472 申请日期 2012.09.27
申请人 株式会社半導体エネルギー研究所 发明人 山崎 舜平;早川 昌彦;篠原 聡始
分类号 H01L21/336;G02F1/1368;H01L27/146;H01L29/786;H01L51/50;H05B33/14 主分类号 H01L21/336
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