メタル温度センサ内蔵型の波長可変フィルタおよび外部共振器型の波長可変レーザモジュール

摘要

Provided are a tunable wavelength filter with an embedded metal temperature sensor and an external-cavity type tunable wavelength laser module. In detail, the tunable wavelength filter with an embedded metal temperature sensor and the external-cavity type tunable wavelength laser module achieve wavelength stability by forming a metal temperature sensor using a resistance change of a metal thin film according to temperature on a point on an isothermal layer having the same temperature distribution as the optical waveguide during a process for fabricating the optical waveguide with polymer to accurately measure a temperature of an optical waveguide.