| 摘要 |
A surface shape measurement device for measuring the surface shape of an object under measurement by irradiating laser light onto a line-shaped region of the object under measurement and imaging the laser light irradiation position from a direction other than the laser light irradiation direction, wherein: the surface shape measurement device is provided with a conversion optical system for dividing the image of the laser light irradiation position into a plurality of images along the longitudinal direction of the region using a plurality of conversion optical paths comprising at least three optical paths not positioned on a common plane defined by at least two mirrors and rearranging the divided plurality of images so that the positions thereof are aligned on the same plane along a direction different from that of the longitudinal direction and an imaging unit having an imaging lens for collectively imaging the plurality of images rearranged by the conversion optical system; each of the plurality of mirrors included in the conversion optical paths is made to extend in a direction corresponding to the longitudinal direction of the image at a length corresponding to the numerical aperture of the imaging lens and the optical path distance from the laser light irradiation position to the mirror; and the plurality of mirrors are disposed so that on the optical path of each conversion optical path, there is no mirror that composes a different conversion optical path. |
