发明名称 POLISHING COMPOSITION AND PRODUCTION METHOD THEREFOR
摘要 Provided is a polishing composition with which haze and surface defects can be reduced. This invention provides a polishing composition comprising a synthetic water-soluble polymer M L-end that has a hydrophobic region at least at one end of its main chain. The hydrophobic region has at least one hydrophobic group derived from a polymerization initiator.
申请公布号 EP3053978(A4) 申请公布日期 2017.03.22
申请号 EP20140848277 申请日期 2014.09.22
申请人 Fujimi Incorporated 发明人 TSUCHIYA, Kohsuke;MORI, Yoshio
分类号 C09K3/14;B24B37/00;C09G1/04;H01L21/304 主分类号 C09K3/14
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