| 摘要 |
A method of examining a sample using a charged-particle microscope, comprising the following steps:
- Mounting the sample on a sample holder;
- Using a particle-optical column to direct at least one beam of particulate radiation (IB) onto a surface S of the sample, thereby producing an interaction that causes emitted radiation (A, B, C, D) to emanate from the sample;
- Using a detector arrangement to detect at least a portion of said emitted radiation, which method comprises the following steps:
- Recording an output On of said detector arrangement as a function of emergence angle ¸ n of said emitted radiation, measured relative to an axis normal to S, thus compiling a measurement set M = {(O n , ¸ n )} for a plurality of values of ¸ n ;
- Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R = {(V k , L k )}, in which a spatial variable V demonstrates a value V k at an associated discrete depth level L k referenced to the surface S,
whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk. |
