| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of realizing a stopper structure resistant to mechanical shock without incurring an increase in thickness and in material costs and also attaining heightened sensitivity, and a method for manufacturing the same.SOLUTION: Provided is an acceleration sensor 1 having frames 3 each composed of a semiconductor substrate, a weight part 2 disposed in the inside thereof with a space in between, and a beam part 4 for flexibly connecting the frames 3 and the weight part 2, a piezoresistance 5 provided in the beam part 4, and an electrode 6 disposed in a fixing part 3a of the frames 3 to which the beam part 4 is connected. There is provided, in an inner circumferential part of the frames 3 and an outer circumferential part of the weight part 2, a stopper structure of the weight part 2 comprising an upper convex part 12, a contact part 13, a lower convex part 15, and a contact part 16 which are engaged with each other, and portions other than the weight part 2 and the fixing part 3a of the frames 3 are formed in greater thickness than the fixing part 3a of the frames 3. |
