| 摘要 |
A silicon carbide semiconductor device includes a drift layer of a first conductivity type, a source region of the first conductivity type, an active trench formed in penetration through the source region, a base region, a termination trench formed around the active trench, a gate insulating film formed on a bottom surface, a side surface of the active trench, a gate electrode embedded and formed in the active trench with the gate insulating film interposed therebetween, a protective diffusion layer of a second conductivity type formed in a lower portion of the active trench and a part of a lower portion of the termination trench and having a first impurity concentration, and a termination diffusion layer of the second conductivity type formed on an outside of the protective diffusion layer in the lower portion of the termination trench and having a second impurity concentration lower than the first impurity concentration. |
