| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of removing an amorphous carbon membrane with which, even when the amorphous carbon membrane contains metal, the amorphous carbon containing the metal is removable.SOLUTION: A method of removing an amorphous carbon membrane containing metal includes: plasmarizing non-oxidized gas in which nitrogen gas and gas containing a halogen element are mixed together; and bringing the plasmarized non-oxidized gas into contact with the amorphous carbon membrane so as to remove the amorphous carbon membrane. |
