| 摘要 |
This ferroelectric thin film comprises lead zirconate titanate niobate. In said ferroelectric thin film, the ratio (a) of number of moles of lead to the total number of moles of zirconium, titanium, and niobium is greater than or equal to 100%; the ratio (b) of the number of moles of niobium to the total number of moles of zirconium, titanium, and niobium is between 10% and 20%, inclusive; and the ratio (c) of the number of moles of zirconium to the total number of moles of zirconium and titanium is between 52% and 59%, inclusive. The film stress exhibited by the ferroelectric thin film is between 100 and 250 MPa, inclusive. |
