| 摘要 |
PROBLEM TO BE SOLVED: To provide a shutter mechanism, a shutter opening/closing method, a program, and a frequency adjustment apparatus having a shutter mechanism capable of processing properly to a plurality of electronic components arranged at narrow intervals.SOLUTION: The frequency adjustment apparatus having the shutter mechanism comprises a shielding plate 16 where a plurality of holes are arranged at locations opposite to a plurality of electronic components arranged in line, the holes made at intervals of a given number of electronic components, a first drive unit 45 moving the shielding plate 16 along the electronic components arranged in line, a plurality of shutters 12 closing or opening each hole, and a second drive unit 31 driving the shutters 12. After the plurality of shutters 12 are opened, and an ion beam is radiated to the plurality of electronic components by using an ion gun 11, the shielding plate 16 is moved along the plurality of electronic components arranged in line by the first drive unit 45 and stopped by positioning the plurality of holes on the electronic component adjacent to the plurality of electronic components where radiation of the ion beam is finished. |
