发明名称 |
INCREASING THE LATERAL RESOLUTION OF ORGANIC VAPOR JET DEPOSITION BY USING A CONFINING GUARD FLOW |
摘要 |
The invention relates to a method of depositing an organic material, wherein
a carrier gas carrying an organic material is ejecting from the nozzle at a flow velocity that is at least 10 % of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate, and wherein a guard flow is provided around the carrier gas. |
申请公布号 |
EP3144988(A1) |
申请公布日期 |
2017.03.22 |
申请号 |
EP20160194736 |
申请日期 |
2004.10.22 |
申请人 |
The Trustees of Princeton University |
发明人 |
SHTEIN, Max;FORREST, Stephen R. |
分类号 |
H01L51/00;C23C14/04;C23C14/12;H01L51/30;H01L51/40 |
主分类号 |
H01L51/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|