发明名称 |
MICRO HEATER AND MICRO SENSOR |
摘要 |
A micro heater includes a substrate and a heater electrode formed on the substrate. The substrate includes a plurality of pores formed to vertically extend through the substrate. A micro sensor includes a substrate, a sensor electrode formed on the substrate, and a heater electrode formed on the substrate. The substrate inner conductor 53'ludes a plurality of pores formed to vertically extend through the substrate. |
申请公布号 |
EP3115775(A3) |
申请公布日期 |
2017.03.22 |
申请号 |
EP20160174642 |
申请日期 |
2016.06.15 |
申请人 |
Point Engineering Co., Ltd. |
发明人 |
AHN, Bum Mo;PARK, Seung Ho;BYUN, Sung Hyun |
分类号 |
G01N27/12 |
主分类号 |
G01N27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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