| 发明名称 |
METHODS OF AND FACTORIES FOR THIN-FILM BATTERY MANUFACTURING |
| 摘要 |
Methods of and factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A factory includes one or more tool sets for fabricating a thin-film battery. |
| 申请公布号 |
EP2481121(A4) |
申请公布日期 |
2017.03.22 |
| 申请号 |
EP20100819304 |
申请日期 |
2010.09.20 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
KWAK, Byung-Sung;BANGERT, Stefan;HAAS, Dieter;NALAMASU, Omkaram |
| 分类号 |
H01M10/04;H01M4/62;H01M6/40;H01M10/052;H01M10/0525;H01M10/0585 |
主分类号 |
H01M10/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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