| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask blank capable of suppressing occurrence of a transfer failure even when a translucent substrate has minute concave defective parts.SOLUTION: Provided is a mask blank comprising a phase shift film disposed on a main surface of a translucent substrate. The translucent substrate has concave defective parts on the main surface on which the phase shift film is formed. The phase shift film includes a structure where, from a side of the translucent substrate, a high-transmission layer and a low-transmission layer having lower light transmittance than the former are laminated in this order. Inner regions of the high transmission layer formed on the concave defective parts have low-density regions, where density in the low-density region is relatively lower than that in an inner region of the high-transmission layer formed on the main surface which is free from the concave defective parts. |
