发明名称 AQUEOUS ALKALINE CLEANING COMPOSITIONS AND METHODS OF THEIR USE
摘要 Aqueous alkaline composition free from organic solvents and metal ion-free silicates, the said compositions comprising (A) a thioamino acid having at least one primary amino group and at least one mercapto group, (B) a quaternary ammonium hydroxide, (C) a chelating and/or corrosion inhibiting agent selected from the group consisting of aliphatic and cycloaliphatic amines having at least two primary amino groups, and aliphatic and cycloaliphatic amines having at least one hydroxy group, (D) a nonionic surfactant selected from the group of acetylenic alcohols, alkyloxylated acetylenic alcohols and alkyloxylated sorbitan monocarboxylic acid mono esters; the use of the alkaline composition for the processing of substrates useful for fabricating electrical and optical devices; and a method for processing substrates useful for fabricating electrical and optical devices making use of the said aqueous alkaline composition.
申请公布号 EP2596091(A4) 申请公布日期 2017.03.22
申请号 EP20110809351 申请日期 2011.07.12
申请人 BASF SE 发明人 MELLIES, Raimund;KLIPP, Andreas
分类号 C11D3/30;C11D1/66;C11D1/72;C11D3/00;C11D3/34;C11D11/00;H01L21/02;H05K3/26 主分类号 C11D3/30
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