发明名称 Method for making a passivated semiconductor substrate
摘要 The present invention is related to a method for making a passivated semiconductor substrate comprising the steps of providing a mono-crystalline substrate surface comprising or consisting of semiconductor material other than silicon and forming a silicon layer on the substrate surface, such that the formed silicon layer is substantially lattice matched to said part of the substrate surface. It is also related to a semiconductor substrate passivated according to the method.
申请公布号 EP1655767(B1) 申请公布日期 2017.03.22
申请号 EP20050447233 申请日期 2005.10.13
申请人 IMEC 发明人 Caymax, Matty;Bonzom, Renaud;Leys, Frederik;Meuris, Marc
分类号 H01L21/02;H01L21/316 主分类号 H01L21/02
代理机构 代理人
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