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发明名称
真空チャンバ及び質量分析電磁石
摘要
申请公布号
JP6098846(B2)
申请公布日期
2017.03.22
申请号
JP20150120985
申请日期
2015.06.16
申请人
日新イオン機器株式会社
发明人
ハフト サミ・ケイ;山元 徹朗
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
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地址
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