| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for inspecting minute magnetic metallic foreign matters which can surely measure even a minute metal foreign matter.SOLUTION: A device for inspecting minute magnetic metallic foreign matters includes: a differential detection coil 5 that is arranged in a moving direction of a minute magnetic metallic foreign matter 2 under the influence of the magnetic field of a cylindrical permanent magnet 3 for applying a magnetic field to the minute magnetic metallic foreign matter 2; and a magnetic flux transformer 4 having an input coil 6 for magnetically coupling magnetic flux of the differential detection coil 5 and to a SQUID magnetic sensor 8, and inputting the coupled magnetic flux. |
