发明名称 デバイス保持器、インナーユニット、アウターユニット、およびトレイ
摘要 Provided is a handler apparatus that conveys a device under test to a test socket, including: an actuator that, prior to fitting of a device holder to the test socket, fits the device holder, and adjusts a position of the device under test on the device holder; and a conveyer that conveys the device holder in which a position of the device under test has been adjusted, to fit the test socket, where the device holder includes: an inner unit to mount the device under test; an outer unit to retain the inner unit to be movable; and a release button to release a lock of movement of the inner unit, in response to being pressed from a side to which the device under test is mounted, and the actuator sets the inner unit to be movable by pressing the release button and adjusts a position of the inner unit.
申请公布号 JP6100296(B2) 申请公布日期 2017.03.22
申请号 JP20150043781 申请日期 2015.03.05
申请人 株式会社アドバンテスト 发明人 相澤 光範;山田 祐也
分类号 H01L21/683;G01R31/26 主分类号 H01L21/683
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