发明名称 |
GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE |
摘要 |
A wavemeter and method for measuring bandwidth for a high repetition rate gas discharge laser having an output laser bean comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000Hz and above, is disclosed which may comprise a focusing lens having a focal length; an optical interferometer creating an interference fringe pattern; an optical detection means positioned at the focal length from the focusing lens; and a bandwidth calculator calculating bandwidth from the position of interference fringes in the interference fringe pattern incident on the optical detection means, defining a DID and a DOD, the respective distances between a pair of first fringe borders and between a pair of second fringe borders in the interference pattern on an axis of the interference pattern, and according to the formula Deltalambda= lambda0 [DOD<2 _ >DID2] /< >[8f<2>-D0<2>]< >where lambda0 is an assumed constant wavelength and D0 = (DOD - DID)2, and f is the focal length. |
申请公布号 |
EP1668312(B1) |
申请公布日期 |
2017.03.22 |
申请号 |
EP20040784259 |
申请日期 |
2004.09.15 |
申请人 |
Cymer, LLC |
发明人 |
RAO, Rajasekhar, M.;MELCHIOR, John, T.;GLATZEL, Hoger, K. |
分类号 |
G01B9/02;G01J3/02;G01J3/26;G01J9/02;H01S3/13 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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