| 摘要 |
A spectroscopic measurement device includes a variable wavelength interference filter provided with a first reflecting film, a second reflecting film, and an electrostatic actuator for changing a gap amount of a gap between the first reflecting film and the second reflecting film, a detection section adapted to detect the light intensity of the light taken out by the variable wavelength interference filter, a voltage setting section and a voltage control section for applying an analog voltage varying continuously to the electrostatic actuator, a voltage monitoring section for monitoring the voltage applied to the electrostatic actuator, a storage section for storing V-λ data, and a light intensity acquisition section for obtaining the light intensity detected by the detection section at a timing at which the light transmitted through the variable wavelength interference filter has the measurement target wavelength based on the voltage monitored by the voltage monitoring section. |
