发明名称 半導体装置の作製方法
摘要 PROBLEM TO BE SOLVED: To provide a technique for manufacturing a flexible display device using a flexible substrate such as a resin substrate.SOLUTION: A flexible display device using a resin substrate is manufactured by the steps of: forming the resin substrate on a fixed substrate via an amorphous silicon film to be a release layer; forming at least a TFT element on the resin substrate; and peeling the resin substrate from the fixed substrate at the amorphous silicon film by irradiating the amorphous silicon film with laser light.SELECTED DRAWING: Figure 3
申请公布号 JP6100950(B2) 申请公布日期 2017.03.22
申请号 JP20160087137 申请日期 2016.04.25
申请人 株式会社半導体エネルギー研究所 发明人 山崎 舜平;高山 徹
分类号 H05B33/10;H01L51/50;H05B33/02;H05B33/14 主分类号 H05B33/10
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