| 发明名称 |
METHOD FOR MANUFACTURING A TREATED SURFACE AND VACUUM PLASMA SOURCES |
| 摘要 |
A vacuum plasma source having a plasma discharge source including a cathode (7) and an anode (9), the anode (9) comprising an anode surface (21) with a cavity (27) therein and an extruded surface area (21) adjacent to said cavity (27). |
| 申请公布号 |
EP2206138(B1) |
申请公布日期 |
2017.03.22 |
| 申请号 |
EP20070822148 |
申请日期 |
2007.11.01 |
| 申请人 |
Oerlikon Trading AG, Trübbach |
发明人 |
RAMM, Juergen;WIDRIG, Beno;KURAPOV, Denis |
| 分类号 |
H01J37/32;C23C14/00;C23C14/22;C23C14/35;C23C14/54 |
主分类号 |
H01J37/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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