发明名称 POSITION DETECTING APPARATUS AND OPTICAL DEVICE
摘要 A position detection device includes a magnetic generation unit that has: a first magnetism generating section that is provided on one end side along a predetermined direction and generates magnetism; a secondmagnetism generating section that is provided on another end side along the predetermined direction and generates magnetism of polarity different from that of the first magnetism generating section; and a low magnetism section that is formed in the first magnetism generating section and the secondmagnetismgenerating section such that a width of the low magnetism section varies along the predetermined direction to generate magnetism lower than those of the first magnetism generating section and the second magnetism generating section, and a magnetic detection unit that is capable of moving relative to the magnetic generation unit along the predetermined direction and that detects the magnetism generated by the first magnetism generating section and the second magnetism generating section.
申请公布号 EP1942317(A4) 申请公布日期 2017.03.22
申请号 EP20060822229 申请日期 2006.10.25
申请人 Nikon Corporation 发明人 MATSUMOTO, Tsuyoshi
分类号 G01D5/245;G01B7/00;G01D5/14;G01D5/18;G03B5/00 主分类号 G01D5/245
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