| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate for suspension having excellent strength in a connection terminal.SOLUTION: A manufacturing method of a substrate for suspension comprises: a laminate preparation step of preparing a laminate including a metal support member, an insulation member formed on the metal support member, and a wiring layer formed on the insulation member, at a location for forming a connection terminal area; an insulation member etching step of wet etching the insulation member, in the wiring layer, using a portion to be served as wiring layer projection part composing a connection terminal as a resist, and forming an isolation layer having an isolation layer projection part supporting the wiring layer projection part; and a metal support member etching step of etching the metal support member after the insulation member etching step to form a metal support substrate, and projecting the wiring layer projection part and the isolation layer projection part than an end of the metal support substrate. |
