发明名称 半導体装置の製造方法
摘要 PROBLEM TO BE SOLVED: To remove remaining air bubbles at a boundary surface between an insulating substrate and an electrode pattern to ensure higher insulation performance and achieve a higher withstand voltage without a change in physical structure of a substrate and a change in encapsulation material.SOLUTION: A manufacturing method of a semiconductor device having an insulating substrate in which an electrode pattern is formed on a surface and a semiconductor element mounted on the surface of the insulating substrate comprises an encapsulation process of encapsulating at least the surface of the insulating substrate and the semiconductor element by an encapsulation material, in which an electric filed for drawing the encapsulation material to the electrode pattern is applied.
申请公布号 JP6101507(B2) 申请公布日期 2017.03.22
申请号 JP20130027939 申请日期 2013.02.15
申请人 富士電機株式会社;富士電機機器制御株式会社 发明人 山城 啓輔
分类号 H01L21/56;H01L25/07;H01L25/18 主分类号 H01L21/56
代理机构 代理人
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