发明名称 EFFICIENT TEMPERATURE FORCING OF SEMICONDUCTOR DEVICES UNDER TEST
摘要 A temperature-forcing system and method for controlling the temperature of an electronic device under test comprises a temperature-forcing head, including a face positionable in thermal contact with the device, and an evaporator, in direct or indirect thermal contact with the face; and a refrigerant circulation subsystem, including a compressor, a condenser, a flow control device for inducing a pressure drop in the refrigerant, and a conduit circuit through which the refrigerant is flowable. The subsystem cooperates with the evaporator so as to define at least one closed loop through which a corresponding bi-phase refrigerant is circulatable, so that, during circulation, the refrigerant is maintained in a liquid phase between the compressor and the flow control device and in a gaseous phase while flowing through the evaporator, The temperature of the device is therefore switchable by the head at a rapid rate of 50 to 150 degrees Celsius per minute.
申请公布号 EP3036486(A4) 申请公布日期 2017.03.22
申请号 EP20130892039 申请日期 2013.08.22
申请人 M.D. MECHANICAL DEVICES LTD. 发明人 YOSEF, Lior Moshe;SIMHON, Eyal
分类号 F25B41/04;F25B29/00;G05D23/19;G05D23/20 主分类号 F25B41/04
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