Method for aligning micro-electronic components

摘要

Alignment of a first micro-electronic component to a receiving surface of a second micro-electronic component is realized by a capillary force-induced self-alignment, combined with an electrostatic alignment. The latter is accomplished by providing at least one first electrical conductor line along the periphery of the first component, and at least one second electrical conductor along the periphery of the location on the receiving surface of the second component onto which the component is to be placed. The contact areas surrounded by the conductor lines are covered with a wetting layer. The electrical conductor lines may be embedded in a strip of anti-wetting material that runs along the peripheries to create a wettability contrast. The wettability contrast helps to maintain a drop of alignment liquid between the contact areas so as to obtain self-alignment by capillary force. By applying appropriate charges on the conductor lines, electrostatic self-alignment is realized, which improves the alignment obtained through capillary force and maintains the alignment during evaporation of the liquid.

主权项

1. A method for aligning a first micro-electronic component to a second micro-electronic component, wherein each component includes a contact area covered by a wetting layer, wherein each component includes a means for containing an alignment liquid on the respective wetting layer, and wherein each component is further provided with one or more conductor lines running along a circumference of the respective contact area, the method comprising:
applying an amount of the alignment liquid to the contact area of the second component; placing the first component with its contact area facing the contact area of the second component so that the alignment liquid contacts both wetting layers, thereby establishing self-alignment of the contact areas through capillary force; applying an electric potential such as to charge the conductor lines of at least one of the components in a manner to realize an electrostatic alignment of the contact areas; and maintaining the electrostatic alignment while the alignment liquid evaporates.