Probing method, probe card for performing the method, and probing apparatus including the probe card

摘要

A probe method includes setting an allowable temperature range, the allowable temperature range including a test temperature and ensuring contact between a pad of a circuit substrate and a needle of a probe card, providing the probe card with a temperature within the allowable temperature range, contacting the needle of the probe card to the pad of the circuit substrate, and supplying a test current to the pad through the needle to test the circuit substrate.

主权项

1. A probe method, the method comprising:
setting an allowable temperature range, the allowable temperature range ensuring contact between a pad of a circuit substrate and a needle of a probe card, a test temperature of the circuit substrate being in the allowable temperature range; providing the probe card with a probe temperature within the allowable temperature range, such that the probe card reaches the probe temperature before reaching the test temperature of the circuit substrate; after the probe card reaches the probe temperature, contacting the needle of the probe card to the pad of the circuit substrate; and supplying a test current to the pad through the needle to test the circuit substrate, the circuit substrate being at the test temperature.