| 发明名称 |
Slit nozzle |
| 摘要 |
A slit nozzle for dispensing liquid onto a surface of a wafer, comprises a nozzle body having a discharge opening whose length is from 10-100 mm and whose width is from 0.5-5 mm. The nozzle body has a dispensing chamber positioned upstream of the discharge opening and extending to the discharge opening, and a liquid distribution chamber positioned upstream of the dispensing chamber. The dispensing chamber and the liquid distribution chamber are in fluid communication with one another and are separated by a reduction section of the nozzle body whose cross-sectional area is at least 20% less than a cross-sectional area of each of the discharge opening and the liquid distribution chamber. |
| 申请公布号 |
US9597703(B2) |
申请公布日期 |
2017.03.21 |
| 申请号 |
US201514625353 |
申请日期 |
2015.02.18 |
| 申请人 |
LAM RESEARCH AG |
发明人 |
Detterbeck Stefan;Passegger Thomas;Bandarapu Bhaskar;Findenig Richard |
| 分类号 |
B05B1/00;B05C5/02;B05B1/04;B05B15/02;B05B1/28;B05B15/00;H01L21/00 |
主分类号 |
B05B1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A slit nozzle for dispensing liquid onto a surface of a wafer, comprising:
a nozzle body including a discharge opening whose length is in a range from 10-100 mm and whose width is in a range from 0.5-5 mm; a dispensing chamber positioned upstream of the discharge opening and extending to the discharge opening; and a liquid distribution chamber positioned upstream of the dispensing chamber, wherein the dispensing chamber and the liquid distribution chamber are in fluid communication with one another and are separated by a reduction section of the nozzle body whose cross-sectional area is at least 20% less than a cross-sectional area of each of the discharge opening and the liquid distribution chamber. |
| 地址 |
Villach AT |
