| 发明名称 | Dielectric high Q MEMS shell gyroscope structure | ||
| 摘要 | A gyroscope includes a cylindrical shell having a first end and a second end, a base on the second end of the shell, a substrate, an anchor coupling the base to the substrate, and electrodes for driving and sensing mechanically separated from the cylindrical shell. | ||
| 申请公布号 | US9599470(B1) | 申请公布日期 | 2017.03.21 |
| 申请号 | US201314024506 | 申请日期 | 2013.09.11 |
| 申请人 | HRL Laboratories, LLC | 发明人 | Kirby Deborah J.;Perahia Raviv;Nguyen Hung;Chang David T.;Boden Tracy J. |
| 分类号 | G01C19/56;G01C19/5691;G01C25/00 | 主分类号 | G01C19/56 |
| 代理机构 | Ladas & Parry | 代理人 | Ladas & Parry |
| 主权项 | 1. A resonant structure comprising: a cylindrical shell having a first end and a second end; a base on the second end of the shell, wherein the base is planar; a substrate; an anchor coupling the base to the substrate; electrodes for driving and sensing mechanically separated from the cylindrical shell; and a top on the first end of the shell; wherein the top fully encloses or partially encloses the first end of the shell. | ||
| 地址 | Malibu CA US | ||