Detection device, sensor, electronic apparatus, and moving object

摘要

A detection device includes a driving circuit and a detection circuit. The detection circuit includes first and second electric charge-voltage conversion circuits to which first and second detection signals are input, first and second gain adjustment amplifiers that amplify output signals of the circuits, a switching mixer that has first and second input nodes to which the output signals of the first and second gain adjustment amplifiers are input, and performs differential synchronous detection thereon on the basis of a synchronization signal from the driving circuit, so as to output first and second output signals to first and second output nodes, first and second filters that receive the first and second output signals from the first and second output nodes of the switching mixer, and an A/D conversion circuit that receives output signals from the first and second filters so as to perform differential A/D conversion thereon.

主权项

1. A detection device comprising:
a driving circuit that drives a physical quantity transducer; and a detection circuit that receives a first detection signal and a second detection signal which are differential signals from the physical quantity transducer, and performs a detection process of detecting a signal corresponding to a physical quantity, wherein the detection circuit includes:
a first voltage output circuit that outputs a voltage corresponding to the first detection signal;a second voltage output circuit that outputs a voltage corresponding to the second detection signal;a first gain adjustment amplifier that amplifies an output signal of the first voltage output circuit;a second gain adjustment amplifier that amplifies an output signal of the second voltage output circuit;a switching mixer that has a first input node to which the output signal of the first gain adjustment amplifier is input and a second input node to which the output signal of the second gain adjustment amplifier is input, performs synchronous detection on the output signal of the first gain adjustment amplifier and the output signal of the second gain adjustment amplifier on the basis of a synchronization signal from the driving circuit, outputs a first output signal to a first output node, and outputs a second output signal to a second output node;a first filter to which the first output signal from the first output node of the switching mixer is input;a second filter to which the second output signal from the second output node of the switching mixer is input; andan A/D conversion circuit that receives an output signal from the first filter and an output signal from the second filter and performs differential A/D conversion thereon, and wherein the switching mixer includes:
a first switching element that is provided between the first input node and the first output node;a second switching element that is provided between the first input node and the second output node;a third switching element that is provided between the second input node and the first output node; and a fourth switching element that is provided between the second input node and the second output node.