Semiconductor device and method of manufacturing a semiconductor device having a glass piece and a single-crystalline semiconductor portion

摘要

A semiconductor device includes a glass piece and an active semiconductor element formed in a single-crystalline semiconductor portion. The single-crystalline semiconductor portion has a working surface, a rear side surface opposite to the working surface and an edge surface connecting the working and rear side surfaces. The glass piece has a portion extending along and in direct contact with the edge surface of the single-crystalline semiconductor portion.

主权项

1. A method of manufacturing a semiconductor device, the method comprising:
forming semiconductor elements in semiconductor portions of a semiconductor substrate, forming a cavity in a working surface of the semiconductor substrate, wherein the cavity forms a grid separating the semiconductor portions comprising the semiconductor elements; arranging a glass material in contact with the working surface of the substrate, wherein the glass material comprises at least one of a powder, glass frits and pellets or is a glass disk; pressing the glass material and the semiconductor substrate against each other, wherein a temperature of the glass material and a force exerted on the glass material are controlled such that fluidified glass material flows into the cavity; controlling the temperature and the force to re-solidify the fluidified glass material, the re-solidified glass material forming a glass piece with a protrusion extending into the cavity, wherein the glass piece is in-situ bonded to the semiconductor substrate; and separating the semiconductor substrate along the cavity to obtain a plurality of semiconductor dies from the semiconductor substrate such that the glass material forms glass frames encompassing the semiconductor dies.