发明名称 Thin layer deposition apparatus utilizing a mask unit in the manufacture of a display device
摘要 A mask unit for depositing a thin layer in a display device. The mask unit includes: a bead mask support which includes a plate; and a bead mask which is placed on the bead mask support.
申请公布号 US9601449(B2) 申请公布日期 2017.03.21
申请号 US201313966499 申请日期 2013.08.14
申请人 Samsung Display Co., Ltd. 发明人 Kim Jong Yun
分类号 H01L27/32;C23C14/42;H01L23/00;H01L51/00;C23C14/04;H01L51/56 主分类号 H01L27/32
代理机构 代理人 Bushnell, Esq. Robert E.
主权项 1. A mask unit for depositing a thin layer in a display device, the mask unit comprising: a deposition mask support which comprises a plate; and a deposition mask having a bead shape placed on the deposition mask support and capable of being separably contacting a contact hole in the display device, wherein the deposition mask comprises a core portion formed of a polymer material and a magnetic layer formed on an outer circumferential surface of the core portion.
地址 Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do KR