发明名称 |
Thin layer deposition apparatus utilizing a mask unit in the manufacture of a display device |
摘要 |
A mask unit for depositing a thin layer in a display device. The mask unit includes: a bead mask support which includes a plate; and a bead mask which is placed on the bead mask support. |
申请公布号 |
US9601449(B2) |
申请公布日期 |
2017.03.21 |
申请号 |
US201313966499 |
申请日期 |
2013.08.14 |
申请人 |
Samsung Display Co., Ltd. |
发明人 |
Kim Jong Yun |
分类号 |
H01L27/32;C23C14/42;H01L23/00;H01L51/00;C23C14/04;H01L51/56 |
主分类号 |
H01L27/32 |
代理机构 |
|
代理人 |
Bushnell, Esq. Robert E. |
主权项 |
1. A mask unit for depositing a thin layer in a display device, the mask unit comprising:
a deposition mask support which comprises a plate; and a deposition mask having a bead shape placed on the deposition mask support and capable of being separably contacting a contact hole in the display device, wherein the deposition mask comprises a core portion formed of a polymer material and a magnetic layer formed on an outer circumferential surface of the core portion. |
地址 |
Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do KR |