Foreign substance detection method, foreign substance detection apparatus, exposure method, and method of manufacturing device

摘要

A foreign substance detection method includes: judging the presence/absence of a foreign substance by measuring a surface condition of a substrate; measuring a surface condition of a second substrate different from the substrate upon replacing the substrate on the chuck with the second substrate, when it is judged in the judging that a foreign substance exists; and determining whether an adhering location of the foreign substance determined to exist in the judging is the substrate, based on a measurement result obtained in the measurement.

主权项

1. A method of detecting presence/absence of a foreign substance on a substrate held on a stage through a chuck, the method comprising:
a judging step of judging the presence/absence of a foreign substance by measuring a surface condition of the substrate; a measurement step of measuring a surface condition of a second substrate different from the substrate upon replacing the substrate on the chuck with the second substrate, when it is judged in the judging step that a foreign substance exists; and a determination step of determining whether an adhering location of the foreign substance determined to exist in the judging step is the substrate, based on a measurement result obtained in the measurement step.